JPH0443303Y2 - - Google Patents
Info
- Publication number
- JPH0443303Y2 JPH0443303Y2 JP7274786U JP7274786U JPH0443303Y2 JP H0443303 Y2 JPH0443303 Y2 JP H0443303Y2 JP 7274786 U JP7274786 U JP 7274786U JP 7274786 U JP7274786 U JP 7274786U JP H0443303 Y2 JPH0443303 Y2 JP H0443303Y2
- Authority
- JP
- Japan
- Prior art keywords
- guide member
- traveling
- fluid
- traveling body
- fixed surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 38
- 230000000694 effects Effects 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 6
- 238000005339 levitation Methods 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Shaping By String And By Release Of Stress In Plastics And The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7274786U JPH0443303Y2 (en]) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7274786U JPH0443303Y2 (en]) | 1986-05-16 | 1986-05-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62185026U JPS62185026U (en]) | 1987-11-25 |
JPH0443303Y2 true JPH0443303Y2 (en]) | 1992-10-13 |
Family
ID=30916476
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7274786U Expired JPH0443303Y2 (en]) | 1986-05-16 | 1986-05-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0443303Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5312760B2 (ja) * | 2007-07-18 | 2013-10-09 | 住友重機械工業株式会社 | 搬送物浮上装置及びこれを用いたステージ装置 |
-
1986
- 1986-05-16 JP JP7274786U patent/JPH0443303Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS62185026U (en]) | 1987-11-25 |
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